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Development of Microfabricated Chemical Gas Sensors and Sensor Arrays for Aerospace ApplicationsAerospace applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. In particular, factors such as minimal sensor size, weight, and power consumption are particularly important. Development areas which have potential aerospace applications include launch vehicle leak detection, engine health monitoring, fire detection, and environmental monitoring. Sensor development for these applications is based on progress in three types of technology: 1) Micromachining and microfabrication (Microsystem) technology to fabricate miniaturized sensors. 2) The use of nanocrystalline materials to develop sensors with improved stability combined with higher sensitivity. 3) The development of high temperature semiconductors, especially silicon carbide. However, due to issues of selectivity and cross-sensitivity, individual sensors are limited in the amount of information that they can provide in environments that contain multiple chemical species. Thus, sensor arrays are being developed to address detection needs in such multi-species environments. This paper discusses the needs of space applications as well as the point-contact sensor technology and sensor arrays being developed to address these needs. Sensors to measure hydrogen, hydrocarbons, hydrazine, nitrogen oxides (NO,), carbon monoxide, oxygen, and carbon dioxide are being developed as well as arrays for leak, fire, and emissions detection. Demonstrations of the technology will also be discussed. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.
Document ID
Document Type
Conference Paper
Hunter, G. W.
(NASA Glenn Research Center Cleveland, OH, United States)
Neudeck, P. G.
(NASA Glenn Research Center Cleveland, OH, United States)
Fralick, G.
(NASA Glenn Research Center Cleveland, OH, United States)
Thomas, V.
(Ohio Aerospace Inst. Cleveland, OH, United States)
Liu, C. C.
(Case Western Reserve Univ. Cleveland, OH, United States)
Wu, W. H.
(Case Western Reserve Univ. Cleveland, OH, United States)
Ward, B.
(Case Western Reserve Univ. Cleveland, OH, United States)
Makel, D.
(Makel Engineering, Inc. Chico, CA, United States)
Date Acquired
August 23, 2013
Publication Date
January 1, 2002
Subject Category
Electronics And Electrical Engineering
Meeting Information
IEEE Sensors 2002(Orlando, FL)
Distribution Limits
Work of the US Gov. Public Use Permitted.
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