Acquisition Source
Goddard Space Flight Center
Document Type
Reprint (Version printed in journal)
Authors
Jamlson, Tracee L. (NASA Goddard Space Flight Center Greenbelt, MD, United States) Konreich, Phillip (Syracuse Univ. NY, United States) Yu, Chung (North Carolina Agricultural and Technical State Univ. Greensboro, NC, United States) Date Acquired
August 23, 2013
Publication Date
October 1, 2005
Publication Information
Publication: J. Microlith., Microfab., Microsyst.
Publisher: International Society for Optical Engineering
Volume: 4
Issue: 4
ISSN: 1537-1646
Subject Category
Electronics And Electrical Engineering Distribution Limits
Public