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Development of electroplated magnetic materials for MEMSSoft ferromagnetic materials have thus far found the most utility in magnetic-MEMS, because the technologies necessary for depositing and micromachining them have been well developed previously by the data storage industry.
Document ID
20060028573
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Myung, N. V.
Sumadjo, P. T. A.
Park, D. Y.
Date Acquired
August 23, 2013
Publication Date
October 20, 2002
Distribution Limits
Public
Copyright
Other
Keywords
MEMS magnetic materials

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