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Low-stress high performance soft magnetic materials for MEMS from additive-free chloride baths
Document ID
20060029152
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/7580
Authors
Myung, N. V.
Urgiles, E.
Son, K.
Lee, C.
George, T.
Date Acquired
August 23, 2013
Publication Date
October 12, 2003
Distribution Limits
Public
Copyright
Other
Keywords
magnetic MEMS

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