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MEMS fabrication of a microelectrode for local electrode atom probe microanalysis
Document ID
20060031514
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/12790
Authors
Kuhlman, K. R.
White, V.
Date Acquired
August 23, 2013
Publication Date
July 29, 2001
Distribution Limits
Public
Copyright
Other
Keywords
nonorthogonal MEMS three-dimensional atom probe x-ray lithography

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