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MEMS Packaging for Biomedical ApplicationsMEMS packaging for biomedical applications can be achieved in several ways.
Document ID
20060032241
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/13723
Authors
Lin, G.
King, K.
Kim, H.
Date Acquired
August 23, 2013
Publication Date
April 2, 2000
Distribution Limits
Public
Copyright
Other
Keywords
MEMS Packaging Teflon Encapsulation

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