Ultrasonic Motors (USM) - an emerging actuation technology for planetary applicationsA hybrid model that addressed a complete ultrasonic motor as a system was developed. The model allows using powerful commercial FE package to express dynamic characteristics of the stator and the rotor in engineering practice. An analog model couples the finite element models for the stator and rotor for the stator-interface layer-rotor syste. The model provides reasonably accurate results for CAD.