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Reliability Issues of COTS MEMS PackagingDuring the last decade, research and development of microelectromechanical systems (MEMS) has shown a significant promise for a variety of commercial applications including automobile and medical purposes.
Document ID
20060034574
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/18888
Authors
Gharrarian, R.
Date Acquired
August 23, 2013
Publication Date
March 20, 2000
Distribution Limits
Public
Copyright
Other
Keywords
Microelectromechanical systems MEMS reliability IC packaging

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