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Record Details

Record 3 of 7327
Reliability Issues of COTS MEMS Packaging
External Online Source: hdl:2014/18888
Author and Affiliation:
Gharrarian, R.
Abstract: During the last decade, research and development of microelectromechanical systems (MEMS) has shown a significant promise for a variety of commercial applications including automobile and medical purposes.
Publication Date: Mar 20, 2000
Document ID:
20060034574
(Acquired Sep 14, 2006)
Document Type: Conference Paper
Meeting Information: GOMAC 2000; Anaheim, CA; United States
Financial Sponsor: Jet Propulsion Lab., California Inst. of Tech.; Pasadena, CA, United States
Description: In English
Distribution Limits: Unclassified; Publicly available; Unlimited
Rights: Copyright
NASA Terms: AUTOMOBILES; MICROELECTROMECHANICAL SYSTEMS; PACKAGING; RELIABILITY
Other Descriptors: MICROELECTROMECHANICAL SYSTEMS MEMS RELIABILITY IC PACKAGING
Availability Source: Other Sources
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