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Microelectronics Packaging Issues of Microelectromechanical Systems (MEMS)
Document ID
20060034879
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/20738
Authors
Ramesham, R.
Date Acquired
August 23, 2013
Publication Date
April 7, 1999
Distribution Limits
Public
Copyright
Other
Keywords
packaging silicon poly-silicon microspacecraft applications
Microelectromechanical Systems (MEMS) standard semiconductor microelectronics

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