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A LIGA Fabricated Quadrupole Array for Mass SpectroscopyA linear array of nine quadrupoles was fabricated using the LIGA process. Pole heights ranging from 1 to 3 mm were fabricated using synchrotron X-ray exposures to form free standing polymethylmethacrylate (PMMA) molds into which copper, gold or nickel were electroplated.
Document ID
20060035352
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/22328
Authors
Jackson, K.
Wiberg, D. V.
Hecht, M. H.
Orient, O. J.
Chutjian, A.
Yee, K.
Fuerstenau, S.
Brennen, R. A.
Hruby, J.
Bonivert, W.
Date Acquired
August 23, 2013
Publication Date
June 20, 1997
Distribution Limits
Public
Copyright
Other
Keywords
Quadrupole Array synchrotron X-ray

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