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Taguchi Method Applied in Optimization of Shipley 5740 Positive Resist DepositionTaguchi Methods of Robust Design Presents a way to optimize output process performance through organized experiments, by using orthogonal arrays for the evaluation of the process controlleable parameters.
Document ID
20060035616
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/22699
Authors
Hui, Allan
Wiberg, Dean V.
Blosiu, Julian
Date Acquired
August 23, 2013
Publication Date
February 22, 1997
Distribution Limits
Public
Copyright
Other
Keywords
Taguchi Method Orthogonal Arrays

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