Uncooled Thermopile Infrared Detector Linear Arrays with Detectivity Greater Than 10(super script9) cmHZ(super script 1/2)/WWe have fabricated 63-element linear arrays of micromachined thermopile infrared detectors on silicon substrates. Each detector consists of a suspended silicon nitride membrane with 11 thermocouples of sputtered Bi-Te and Bi-Sb-Te films.