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Silicon Bulk Micromachined Vibratory GyroscopeThis paper reports on design, modeling, fabrication, and characterization of a novel silicon bulk micromachined vibratory rate gyroscope designed for microspacecraft applications. The new microgyroscope consists of a silicon four leaf cloverstructure with a post attached to the center.
Document ID
20060036396
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/26094
Authors
Tang, T. K.
Gutierrez, R. C.
Wilcox, J. Z.
Stell, C.
Vorperian, V.
Calvet, R.
Li, W. J.
Charkaborty, I.
Bartman, R.
Kaiser, W. J.
Date Acquired
August 23, 2013
Publication Date
June 2, 1996
Distribution Limits
Public
Copyright
Other
Keywords
gyroscope microgyroscope

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