Test Structures Applied to the Rapid Prototyping of Sensors

Recently, test structures were used to aid in the rapid development of a gas sensor and pressure sensor. These sensors were fabricated using co-fired ceramic technology and a multiproject approach. This talk will describe results obtained from a ceramic substrate which contained 36 chips with six variants including the sensors, process control monitors, and an interconnect chip. As far as the authors know, this is the first implementation of multi-projects in co-fired ceramic substrate. The gas sensor is being developed for the Space Shuttle and the pressure gage is being developed as a Martian barometer.