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A Packaged Silicon MEMS Vibratory Gyroscope for MicrospacecraftIn this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested.
Document ID
20060036861
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/27778
Authors
Tang, T. K.
Gutierrez, R. C.
Stell, C. B.
Vorperian, V.
Arakaki, G. A.
Rice, J. T.
Li, W. J.
Chakraborty, I.
Shceglov, K.
Wilcox, J. Z.
Kaiser, W. J.
Date Acquired
August 23, 2013
Publication Date
January 26, 1997
Distribution Limits
Public
Copyright
Other
Keywords
MEMS micro-electromechanical system microspacecraft attitude control

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