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Test Structures for Rapid Prototyping of Gas and Pressure SensorsA multi-project ceramic substrate was used in developing a gas sensor and pressure sensor. The ceramic substrate cantained 36 chips with six variants including sensors, process control monitors, and an interconnect ship. Tha gas sensor is being developed as an air quality monitor and the pressure gauge as a barometer.
Document ID
20060036863
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/27780
Authors
Buehler, M.
Cheng, L. J.
Martin, D.
Date Acquired
August 23, 2013
Publication Date
October 20, 1996
Distribution Limits
Public
Copyright
Other
Keywords
ceramics ceramic substrate gas sensor pressure sensor reliability
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