Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
Authors
Frank T. Hartley, Ben Dolgen, Paul M. Zavracky Date Acquired
August 23, 2013
Publication Date
June 1, 1995
Subject Category
Electronics And Electrical Engineering Meeting Information
Meeting: Transducer ''95; Eurosensors IX
Country: Sweden
Start Date: June 1, 1995
Distribution Limits
Public
Keywords
micromachining, microaccelerometer