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Isolated post resonator mesogyroscopeA new symmetric vibratory gyroscope principle has been devised in which a central post proof mass is counter-rocked against an outer sensing plate such that the motion is isolated from the gyroscope case. Prototype gyroscopes have been designed and fabricated with micromachined silicon at mesoscale (20-cm resonator width), vs. microscale (e.g., 2-mm resonator width) to achieve higher sensitivity and machined precision. This novel mesogyro design arose out of an ongoing technical cooperation between JPL and Boeing begun in 1997 to advance the design of micro-inertial sensors for low-cost space applications. This paper describes the theory of operation of the mesogyro and relationships with other vibratory gyroscopes, the mechanical design, closed loop electronics design, bulk silicon fabrication and packaged gyroscope assembly and test methods. The initial packaged prototype test results are reported for what is believed to be the first silicon mesogyroscope.
Document ID
20060043594
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Challoner, Dorian
Peay, Chris
Wellman, Joanne
Shcheglov, Kirill
Hayworth, Ken
Wiberg, Dean
Yee, Karl
Sipppola, Clayton
Date Acquired
August 23, 2013
Publication Date
April 29, 2004
Meeting Information
Meeting: IEEE Position, Location, Navigation Symposium
Location: Monterey, CA
Country: United States
Start Date: April 29, 2004
Distribution Limits
Public
Copyright
Other
Keywords
mesogyroscope
Inertial Measurement Unit (IMU)
vaccum packaging
microelectromechanical systems (MEMS)

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