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Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph ActuatorsWe have demonstrated a large aperture (50 mm x 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane 'transferred' in its entirety onto a 20 x 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 [m at 20V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30%.
Document ID
20060044297
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Hishinumat, Yoshikazu
Yang, Eui - Hyeok (EH)
Date Acquired
August 23, 2013
Publication Date
June 5, 2005
Subject Category
Optics
Meeting Information
Meeting: Transducers ''05
Location: Seoul
Country: South Korea
Start Date: June 5, 2005
Distribution Limits
Public
Copyright
Other
Keywords
unimorph
Deformable mirrors
actuators
Piezoelectric unimorph actuators
mirror

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