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High Resistivity Transparent/Conductive Coatings for Space Applications: Problems and Possible ImprovementsWe have prepared transparent films with a sheet relativity of 10(exp 1) to 10(exp 12) ohm/square by co-depositing a transparent conducting oxide (TCO) with magnesium fluoride, using two independently controlled RF magnetron sputter guns to facilitate adjustment of the film composition, Co-deposited indium tin oxide (ITO) and MgF2 on quartz and flexible polymeric substrate exhibited reasonably stable sheet resistivity over several months' time, with substantially lower optical reflectance than that of pure ITO. However, exposure to low-intensity blue light reduces sheet resistivity by as much as two orders of magnitude. Our results suggest this photoconductivity effect may be present in all InO(x)-based materials. We find that sheet resistivity can by "tuned" by admitting a small amount of high-purity air during deposition offering the possibility of closed loop process control.
Document ID
20070024816
Acquisition Source
Glenn Research Center
Document Type
Reprint (Version printed in journal)
Authors
Cashman, Thomas
(Cleveland State Univ. Cleveland, OH, United States)
Demko, Rikako
(Cleveland State Univ. Cleveland, OH, United States)
Uppala, Nischala
(Cleveland State Univ. Cleveland, OH, United States)
Vemulapalli, Jyothi
(Cleveland State Univ. Cleveland, OH, United States)
Welch, Bryan
(Cleveland State Univ. Cleveland, OH, United States)
Hambourger, Paul D.
(Cleveland State Univ. Cleveland, OH, United States)
Date Acquired
August 23, 2013
Publication Date
September 1, 2003
Publication Information
Publication: Vacuum Technology and Coating
Subject Category
Chemistry And Materials (General)
Funding Number(s)
CONTRACT_GRANT: NCC3-1033
CONTRACT_GRANT: NCC3-1023
CONTRACT_GRANT: NCC3-740
Distribution Limits
Public
Copyright
Other

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