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Silicon micromachined broad band light sourceA micro electromechanical system (MEMS) broad band incandescent light source includes three layers: a top transmission window layer; a middle filament mount layer; and a bottom reflector layer. A tungsten filament with a spiral geometry is positioned over a hole in the middle layer. A portion of the broad band light from the heated filament is reflective off the bottom layer. Light from the filament and the reflected light of the filament are transmitted through the transmission window. The light source may operate at temperatures of 2500 K or above. The light source may be incorporated into an on board calibrator (OBC) for a spectrometer.
Document ID
20080005154
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
George, Thomas
Jones, Eric
Tuma, Margaret L.
Eastwood, Michael
Hansler, Richard
Date Acquired
August 24, 2013
Publication Date
September 28, 2004
Subject Category
Instrumentation And Photography
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-6,796,866
Patent Application
US-PATENT-APPL-SN-273676
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