Extremely High Vacuum Chamber for Low Outgassing Processing at NASA Goddard

The levels of vacuum that proceed past the high vacuum range into the ultra high and then the extremely high vacuum range become more difficult to achieve each decade that a system progresses through. This paper will explore the difficulties and cover some of the design principles used in achieving vacuum levels in the low 10-12 torr pressure range. This system was entirely built with commercially-available off the shelf (COTS) components. This chamber was designed in 1998 to provide a very low outgassing environment for the processing and sealing of charge-coupled devices (CCD's) for some of the Hubble Space Telescope replacement optics.