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Fabrication and Characteristics of Free Standing Shaped Pupil Masks for TPF-CoronagraphDirect imaging and characterization of exo-solar terrestrial planets require coronagraphic instruments capable of suppressing star light to 10-10. Pupil shaping masks have been proposed and designed1 at Princeton University to accomplish such a goal. Based on Princeton designs, free standing (without a substrate) silicon masks have been fabricated with lithographic and deep etching techniques. In this paper, we discuss the fabrication of such masks and present their physical and optical characteristics in relevance to their performance over the visible to near IR bandwidth.
Document ID
20090018996
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Balasubramanian, Kunjithapatham
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Echternach, Pierre M.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Dickie, Matthew R.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Muller, Richard E.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
White, Victor E.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Hoppe, Daniel J.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Shaklan, Stuart B.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Belikov, Ruslan
(Princeton Univ. Princeton, NJ, United States)
Kasdin, N. Jeremy
(Princeton Univ. Princeton, NJ, United States)
Vanderbei, Robert J.
(Princeton Univ. Princeton, NJ, United States)
Ceperley, Daniel
(California Univ. Berkeley, CA, United States)
Neureuther, Andrew R.
(California Univ. Berkeley, CA, United States)
Date Acquired
August 24, 2013
Publication Date
May 24, 2006
Subject Category
Optics
Meeting Information
Meeting: SPIE Astronomical Telescopes and Instrumentation
Location: Orlando, FL
Country: United States
Start Date: May 24, 2006
End Date: May 31, 2006
Sponsors: International Society for Optical Engineering
Distribution Limits
Public
Copyright
Other
Keywords
terrestrial planet finder
Deep reactive ion etching (DRIE)
shaped pupil mask
coronagraph

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