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Micro and Nano Systems for Space ExplorationThis slide presentation reviews the use of micro and nano systems in Space exploration. Included are: an explanation of the rationales behind nano and micro technologies for space exploration, a review of how the devices are fabricated, including details on lithography with more information on Electron Beam (E-Beam) lithography, and X-ray lithography, a review of micro gyroscopes and inchworm Microactuator as examples of the use of MicroElectoMechanical (MEMS) technology. Also included is information on Carbon Nanotubes, including a review of the CVD growth process. These micro-nano systems have given rise to the next generation of miniature X-ray Diffraction, X-ray Fluorescence instruments, mass spectrometers, and terahertz frequency vacuum tube oscillators and amplifiers, scanning electron microscopes and energy dispersive x-ray spectroscope. The nanotechnology has also given rise to coating technology, such as silicon nanotip anti-reflection coating.
Document ID
20090022364
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Manohara, Harish
Date Acquired
August 24, 2013
Publication Date
July 23, 2007
Subject Category
Electronics And Electrical Engineering
Meeting Information
Meeting: SAME - TEC MEMS Workshop
Location: Texas
Country: United States
Start Date: July 23, 2007
Distribution Limits
Public
Copyright
Other
Keywords
carbon nanotubes
in situ
micro gyroscope
silicon nanotips

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