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A Piezoelectric Unimorph Deformable Mirror Concept by Wafer Transfer for Ultra Large Space TelescopesFuture concepts of ultra large space telescopes include segmented silicon mirrors and inflatable polymer mirrors. Primary mirrors for these systems cannot meet optical surface figure requirements and are likely to generate over several microns of wavefront errors. In order to correct for these large wavefront errors, high stroke optical quality deformable mirrors are required. JPL has recently developed a new technology for transferring an entire wafer-level mirror membrane from one substrate to another. A thin membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers. The measured peak-to-valley surface error of a transferred and patterned membrane (1 mm x 1 mm x 0.016 mm) is only 9 nm. The mirror element actuation principle is based on a piezoelectric unimorph. A voltage applied to the piezoelectric layer induces stress in the longitudinal direction causing the film to deform and pull on the mirror connected to it. The advantage of this approach is that the small longitudinal strains obtainable from a piezoelectric material at modest voltages are thus translated into large vertical displacements. Modeling is performed for a unimorph membrane consisting of clamped rectangular membrane with a PZT layer with variable dimensions. The membrane transfer technology is combined with the piezoelectric bimorph actuator concept to constitute a compact deformable mirror device with a large stroke actuation of a continuous mirror membrane, resulting in a compact A0 systems for use in ultra large space telescopes.
Document ID
Document Type
Conference Paper
External Source(s)
Yang, Eui-Hyeok
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Shcheglov, Kirill
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 25, 2013
Publication Date
August 22, 2002
Subject Category
Meeting Information
SPIE International Symposium on Astronomical Telescopes and Instrumentation(Waikoloa, HI)
Distribution Limits
continuous mirror
microelectromechanical Systems (MEMS)
wafer-level membrane transfer
Piezoelectric actuator
Deformable mirror (DM)
adaptive optics
unimorph actuation

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