Acquisition Source
Jet Propulsion Laboratory
Document Type
Presentation
Authors
Greer, F. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Hoenk, M. E. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Jones, T. J. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Jacquot, B. C. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Monacos, S. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Nikzad, S. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Hamden, E. (Columbia Univ. NY, United States) Schiminovich, D. (Columbia Univ. NY, United States) Date Acquired
August 26, 2013
Publication Date
June 27, 2011
Subject Category
Instrumentation And Photography Meeting Information
Meeting: Atomic Layer Depostion 2011
Location: Cambridge, MA
Country: United States
Start Date: June 27, 2011
Distribution Limits
Public
Keywords
quantum efficiencyatomic layer deposition