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Curvature Control of Silicon Microlens for THz Dielectric AntennaWe have controlled the curvature of silicon microlens by changing the amount of photoresist in order to microfabricate hemispherical silicon microlens which can improve the directivity and reduce substrate mode losses.
Document ID
20120017938
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Lee, Choonsup
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Chattopadhyay, Goutam
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Cooper, Ken
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Mehdi, Imran
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 25, 2013
Publication Date
September 23, 2012
Subject Category
Communications And Radar
Distribution Limits
Public
Copyright
Other
Keywords
silicon microlens
silicon antenna technology

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