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320 x 256 Complementary Barrier Infrared Detector Focal Plane Array for Long-Wave Infrared ImagingA 320 x 256 Complementary Barrier Infrared (CBIRD) focal plane array for long-wavelength infrared (LWIR) imaging is reported. The arrays were grown by molecular beam expitaxy (MBE) with a 300 period 1.9 um thick absorber. The mean dark current density of 2.2 x 10-4 A/cm2 was measured at an operating bias of 128 mV with a long wavelength cutoff of 8.8 ?m observed at 50% of the peak. The maximum quantum efficiency was 54% measured at 5.6 ?m. Operating at T = 80K, the array yielded an 81% fill factor with 97% operability. Good imagery with a mean noise equivalent different temperature (NE?T) of 18.6 mK and a mean detectivity of D* = 1.3 x 1011 cm-Hz1/2/W was achieved. The substrate was thinned using mechanical lapping and neither an AR coating nor a passivation layer was applied. This article provides the details of the fabrication process for achieving low-dark current LWIR CBIRD arrays. Discussion for an effective hard mask for excellent pattern transfer is given and appropriate mounting techniques for good thermal contact during the dry etching process is described. The challenges and differences between etching large 200 ?m test diodes and small 28 ?m FPA pixels are given.
Document ID
20130000019
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Nguyen, Jean
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Rafol, Sir B.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Soibel, Alexander
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Khoskhlagh, Arezou
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Ting, David Z.-Y.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Liu, John K.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Mumolo, Jason M.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Gunapala, Sarath D.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 27, 2013
Publication Date
April 23, 2012
Subject Category
Instrumentation And Photography
Meeting Information
Meeting: SPIE Defense and Security Symposium
Location: Baltimore, MD
Country: United States
Start Date: April 23, 2012
End Date: April 27, 2012
Sponsors: International Society for Optical Engineering
Distribution Limits
Public
Copyright
Other
Keywords
Focal Plane Arrays (FPA)
Superlattice Detectors
InAs/GaSb
Long-wavelength Infrared
Inductively Coupled Plasma Dry Etching

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