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Dual ohmic contact to N- and P-type silicon carbideSimultaneous formation of electrical ohmic contacts to silicon carbide (SiC) semiconductor having donor and acceptor impurities (n- and p-type doping, respectively) is disclosed. The innovation provides for ohmic contacts formed on SiC layers having n- and p-doping at one process step during the fabrication of the semiconductor device. Further, the innovation provides a non-discriminatory, universal ohmic contact to both n- and p-type SiC, enhancing reliability of the specific contact resistivity when operated at temperatures in excess of 600.degree. C.
Document ID
20130010697
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Okojie, Robert S.
Date Acquired
August 27, 2013
Publication Date
February 12, 2013
Subject Category
Electronics And Electrical Engineering
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-8,373,175
Patent Application
US-Patent-Appl-SN-12/791,276
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