NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Back to Results
Processing of Nanostructured Devices Using Microfabrication TechniquesSystems and methods that incorporate nanostructures into microdevices are discussed herein. These systems and methods can allow for standard microfabrication techniques to be extended to the field of nanotechnology. Sensors incorporating nanostructures can be fabricated as described herein, and can be used to reliably detect a range of gases with high response.
Document ID
20150003370
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Hunter, Gary W
Xu, Jennifer C
Evans, Laura J
Kulis, Michael H
Berger, Gordon M
Vander Wal, Randall L
Date Acquired
March 20, 2015
Publication Date
November 4, 2014
Subject Category
Electronics And Electrical Engineering
Instrumentation And Photography
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-8,877,636
Patent Application
US-Patent-Appl-SN-13/036,887
No Preview Available