Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
Authors
Kaul, A. B. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Megerian, K. G. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Baron, R. L. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Jennings, A. T. (California Inst. of Tech. Pasadena, CA, United States) Jang, D. (California Inst. of Tech. Pasadena, CA, United States) Greer, J. R. (California Inst. of Tech. Pasadena, CA, United States) Date Acquired
April 21, 2015
Publication Date
April 25, 2011
Subject Category
Electronics And Electrical EngineeringMechanical EngineeringNonmetallic Materials Meeting Information
Meeting: 2011 SPIE Defense Security and Sensing Conference
Location: Orlando, FL
Country: United States
Start Date: April 25, 2011
End Date: April 29, 2011
Sponsors: International Society for Optical Engineering
Distribution Limits
Public
Keywords
top-down fabricationbottom-up synthesisplasmaenhanced chemical vapor deposition (PECVD)3D electronicsnanofabrication