Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
Authors
Kaul, Anupama B. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Megerian, Krikor G. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) von Allmen, Paul (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Kowalczyk, Robert (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Baron, Richard (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Date Acquired
April 22, 2015
Publication Date
April 15, 2009
Subject Category
Nonmetallic MaterialsMechanical EngineeringElectronics And Electrical Engineering Meeting Information
Meeting: 2009 MRS Spring Meeting & Exhibit
Location: San Francisco, CA
Country: United States
Start Date: April 13, 2009
End Date: April 17, 2009
Sponsors: Materials Research Society
Distribution Limits
Public
Keywords
plasma-enhanced chemical vapor deposition (PECVD),3D electronicsnanofabricationtop dpwn fabrication