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Characterization of Plasma Synthesized Vertical Carbon Nanofibers for Nanoelectronics ApplicationsWe report on the material characterization of carbon nanofibers (CNFs) which are assembled into a three-dimensional (3D) configuration for making new nanoelectromechanical systems (NEMS). High-resolution scanning electron microscopy (SEM) and x-ray electron dispersive spectroscopy (XEDS) are employed to decipher the morphology and chemical compositions of the CNFs at various locations along individual CNFs grown on silicon (Si) and refractory nitride (NbTiN) substrates, respectively. The measured characteristics suggest interesting properties of the CNF bodies and their capping catalyst nanoparticles, and growth mechanisms on the two substrates. Laser irradiation on the CNFs seems to cause thermal oxidation and melting of catalyst nanoparticles. The structural morphology and chemical compositions of the CNFs revealed in this study should aid in the applications of the CNFs to nanoelectronics and NEMS.
Document ID
20150007356
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Lee, Jaesung
(Case Western Reserve Univ. Cleveland, OH, United States)
Feng, Philip X.-L.
(Case Western Reserve Univ. Cleveland, OH, United States)
Kaul, Anupama B.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
May 5, 2015
Publication Date
April 1, 2013
Subject Category
Electronics And Electrical Engineering
Meeting Information
Meeting: 2013 Materials Research Society (MRS) Spring Meeting and Exhibit
Location: San Francisco, CA
Country: United States
Start Date: April 1, 2013
End Date: April 5, 2013
Distribution Limits
Public
Copyright
Other
Keywords
carbon nanomaterials
nanoelectronics
relays
carbon nanofibers
Nanoelectromechanical systems (NEMS)
resonators

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