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Silicon Micromachining for Terahertz Component DevelopmentWaveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.
Document ID
20150008048
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Chattopadhyay, Goutam
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Reck, Theodore J.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Jung-Kubiak, Cecile
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Siles, Jose V.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Lee, Choonsup
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Lin, Robert
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Mehdi, Imran
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
May 13, 2015
Publication Date
December 14, 2013
Subject Category
Mechanical Engineering
Meeting Information
Meeting: 2013 IEEE MTT-S International Microwave and RF Conference
Location: New Delhi
Country: India
Start Date: December 14, 2013
End Date: December 16, 2013
Sponsors: Institute of Electrical and Electronics Engineers
Distribution Limits
Public
Copyright
Other
Keywords
Filter
communications
cancer
imaging

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