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Power Spectral Density Specification and Analysis of Large Optical SurfacesThe 2-dimensional Power Spectral Density (PSD) can be used to characterize the mid- and the high-spatial frequency components of the surface height errors of an optical surface. We found it necessary to have a complete, easy-to-use approach for specifying and evaluating the PSD characteristics of large optical surfaces, an approach that allows one to specify the surface quality of a large optical surface based on simulated results using a PSD function and to evaluate the measured surface profile data of the same optic in comparison with those predicted by the simulations during the specification-derivation process. This paper provides a complete mathematical description of PSD error, and proposes a new approach in which a 2-dimentional (2D) PSD is converted into a 1-dimentional (1D) one by azimuthally averaging the 2D-PSD. The 1D-PSD calculated this way has the same unit and the same profile as the original PSD function, thus allows one to compare the two with each other directly.
Document ID
20150008337
Document Type
Conference Paper
External Source(s)
Authors
Sidick, Erkin
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
May 18, 2015
Publication Date
June 15, 2009
Subject Category
Optics
Meeting Information
SPIE Europe Optical Metrology(Munich)
Distribution Limits
Public
Copyright
Other
Keywords
wavefront
optical surface
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