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Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm WafersAdvanced ACTPol (AdvACT) is a third-generation cosmic microwave background receiver to be deployed in 2016 on the Atacama Cosmology Telescope (ACT). Spanning five frequency bands from 25 to 280 GHz and having just over 5600 transition-edge sensor (TES) bolometers, this receiver will exhibit increased sensitivity and mapping speed compared to previously fielded ACT instruments. This paper presents the fabrication processes developed by NIST to scale to large arrays of feedhorn-coupled multichroic AlMn-based TES polarimeters on 150-mm diameter wafers. In addition to describing the streamlined fabrication process which enables high yields of densely packed detectors across larger wafers, we report the details of process improvements for sensor (AlMn) and insulator (SiN(sub x)) materials and microwave structures, and the resulting performance improvements.
Document ID
20160013324
Document Type
Reprint (Version printed in journal)
Authors
Duff, S. M.
(National Inst. of Standards and Technology Boulder, CO, United States)
Austermann, J.
(National Inst. of Standards and Technology Boulder, CO, United States)
Beall, J. A.
(National Inst. of Standards and Technology Boulder, CO, United States)
Becker, D.
(National Inst. of Standards and Technology Boulder, CO, United States)
Datta, R.
(Michigan Univ. Ann Arbor, MI, United States)
Gallardo, P. A.
(Cornell Univ. Ithaca, NY, United States)
Henderson, S. W.
(Cornell Univ. Ithaca, NY, United States)
Hilton, G. C.
(National Inst. of Standards and Technology Boulder, CO, United States)
Ho, S. P.
(Princeton Univ. Princeton, NJ, United States)
Hubmayr, J.
(National Inst. of Standards and Technology Boulder, CO, United States)
Koopman, B. J.
(Cornell Univ. Ithaca, NY, United States)
Li, D.
(Stanford Research Inst. Menlo Park, CA, United States)
McMahon, J.
(Michigan Univ. Ann Arbor, MI, United States)
Nati, F.
(Pennsylvania Univ. Philadelphia, PA, United States)
Niemack, M. D.
(Cornell Univ. Ithaca, NY, United States)
Pappas, C. G.
(Princeton Univ. Princeton, NJ, United States)
Salatino, M.
(Princeton Univ. Princeton, NJ, United States)
Schmitt, B. L.
(Pennsylvania Univ. Philadelphia, PA, United States)
Simon, S. M.
(Pennsylvania Univ. Philadelphia, PA, United States)
Staggs, S. T.
(Princeton Univ. Princeton, NJ, United States)
Stevens, J. R.
(Cornell Univ. Ithaca, NY, United States)
Van Lanen, J.
(National Inst. of Standards and Technology Boulder, CO, United States)
Vavagiakis, E. M.
(Cornell Univ. Ithaca, NY, United States)
Ward, J. T.
(Pennsylvania Univ. Philadelphia, PA, United States)
Wollack, E. J.
(NASA Goddard Space Flight Center Greenbelt, MD United States)
Date Acquired
November 9, 2016
Publication Date
March 22, 2016
Publication Information
Publication: Journal of Low Temperature Physics
Publisher: Springer International Publishing AG
Volume: 184
Issue: 3
ISSN: 0022-2291
Subject Category
Electronics And Electrical Engineering
Astrophysics
Report/Patent Number
GSFC-E-DAA-TN32343
Distribution Limits
Public
Copyright
Other
Keywords
Atacama Cosmology Telescope(ACT)
transition-edge sensor (TES) bolometers
feedhorn-coupled multichroic

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