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System and Method for Fabricating Super Conducting Circuitry on Both Sides of an Ultra-Thin LayerA method of fabricating circuitry in a wafer includes depositing a superconducting metal on a silicon on insulator wafer having a handle wafer, coating the wafer with a sacrificial layer and bonding the wafer to a thermally oxide silicon wafer with a first epoxy. The method includes flipping the wafer, thinning the flipped wafer by removing a handle wafer, etching a buried oxide layer, depositing a superconducting layer, bonding the wafer to a thermally oxidized silicon wafer having a handle wafer using an epoxy, flipping the wafer again, thinning the flipped wafer, etching a buried oxide layer from the wafer and etching the sacrificial layer from the wafer. The result is a wafer having superconductive circuitry on both sides of an ultra-thin silicon layer.
Document ID
20170001985
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Brown, Ari D.
Mikula, Vilem
Date Acquired
March 3, 2017
Publication Date
February 21, 2017
Subject Category
Electronics And Electrical Engineering
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-9,577,177
Patent Application
US-Patent-Appl-SN-15/164,365
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