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Packaged Capacitive Pressure Sensor System for Aircraft Engine Health MonitoringThis paper describes the development of a packaged silicon carbide (SiC) based MEMS pressure sensor system designed specifically for a conventional turbofan engine. The electronic circuit is based on a Clapp-type oscillator that incorporates a 6H-SiC MESFET, a SiCN MEMS capacitive pressure sensor, titanate MIM capacitors, wirewound inductors, and thick film resistors. The pressure sensor serves as the capacitor in the LC tank circuit, thereby linking pressure to the resonant frequency of the oscillator. The oscillator and DC bias circuitry were fabricated on an alumina substrate and secured inside a metal housing. The packaged sensing system reliably operates at 0 to 350 psi and 25 to 540C. The system has a pressure sensitivity of 6.8 x 10E-2 MHzpsi. The packaged system shows negligible difference in frequency response between 25 and 400C. The fully packaged sensor passed standard benchtop acceptance tests and was evaluated on a flight-worthy engine.
Document ID
20170004122
Acquisition Source
Glenn Research Center
Document Type
Presentation
Authors
Scardelletti, Maximilian C.
(NASA Glenn Research Center Cleveland, OH United States)
Zorman, Christian A.
(Case Western Reserve Univ. Cleveland, OH, United States)
Date Acquired
May 1, 2017
Publication Date
October 30, 2016
Subject Category
Space Transportation And Safety
Air Transportation And Safety
Electronics And Electrical Engineering
Report/Patent Number
GRC-E-DAA-TN36811
Meeting Information
Meeting: IEEE Sensors
Location: Orlando, FL
Country: United States
Start Date: October 30, 2016
End Date: November 2, 2016
Sponsors: Institute of Electrical and Electronics Engineers
Funding Number(s)
WBS: WBS 533127.02.01.03.02
Distribution Limits
Public
Copyright
Public Use Permitted.
Keywords
Harsh environment
Clapp Oscillator
Capacitive Pressure Sensor
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