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Gas Sensors with Contact PadsSystems, methods, and other embodiments associated with gas detecting sensors. According to one embodiment, a gas sensor includes a metal layer, a barrier interlayer, a substrate layer, a first insulating layer, a conduction path, a contact pad, and a second insulating layer. The conduction path connects the metal layer to the contact pad. The second insulating layer prevents diffusion through the contact pad, the conduction path, or the metal layer. The sensor includes a wire bonded electrical connection to the contact pad such that voltage can be determined and/or applied.
Document ID
20180003634
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Xu, Jennifer
Hunter, Gary W.
Date Acquired
June 29, 2018
Publication Date
May 15, 2018
Subject Category
Instrumentation And Photography
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-9,970,914
Patent Application
US-Patent-Appl-SN-14/679,278
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