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Fabrication and Sub-Assembly of Electrostatically Actuated Silicon Nitride Microshutter ArraysWe have developed a new microshutter array (MSA) subassembly. The MSA and a silicon substrate are flip-bonded together. The MSA has a new back side fabrication process to actuate the microshutters electrostatically, and the new silicon substrate has light shields. The microshutters with a pixel size of 100 x 200 sq micrometers are fabricated on silicon with thin silicon nitride membranes. The microshutters rotate 90 deg on torsion bars. The selected microshutters are actuated, held, and addressed electrostatically by applying voltages on the electrodes the front and back sides of the microshutters. The substrate has the light shield to block lights around the microshutters. Also, electrical connections are made from the MSA to a controller board via the substrate.
Document ID
Acquisition Source
Goddard Space Flight Center
Document Type
Conference Paper
Oh, Lance H.
(SGT, Inc. Greenbelt, MD, United States)
Li, Mary J.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Kim, Kyowon
(Arctic Slope Regional Corp. (ASRC) Federal Greenbelt, MD, United States)
Kelly, Daniel P.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Kutyrev, Alexander S.
(Maryland Univ. College Park, MD, United States)
Moseley, Samuel H.
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Costen, Nicholas P.
(SGT, Inc. Greenbelt, MD, United States)
Manos, George
(NASA Goddard Space Flight Center Greenbelt, MD, United States)
Date Acquired
July 16, 2018
Publication Date
June 3, 2018
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
Meeting Information
Meeting: Hilton Head Workshop 2018: A Solid-State Sensors, Actuators and Microsystems Workshop
Location: Hilton Head Island, SC
Country: United States
Start Date: June 3, 2018
End Date: June 7, 2018
Sponsors: The Transducer Research Foundation (TRF)
Funding Number(s)
Distribution Limits
Public Use Permitted.
microshutter array (MSA) sub-assembly
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