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Growth of Bio Sensor Materials by Physical Vapor Transport MethodRecently there is a big thrust on bio-inspired sensors and there has been a large rise in the investment and expectations for nanotechnology to meet these goals. For in situ sensor development materials deposition on substrate is essential part of device development. Physical vapor deposition (PVD), chemical vapor deposition (CVD) and molecular organic vapor deposition methods have developed for growth of semiconductor bulk and thin film growth with some modifications have been used for these materials. Oxides and other elements of the VI group such as sulfides and selenides are key components in the skins of many species. Growth of ordered structures containing these elements have been achieved by using PVD method. This paper describes effect of growth parameters during PVD growth on the quality of materials. Growth kinetics and mechanism will be discussed for the vertical and horizontal growth reactors. Since most of the efficient materials systems are multinary and in many cases non-congruent, PVD provides a pathway to grow materials below melting temperature.
Document ID
20180004186
Acquisition Source
Marshall Space Flight Center
Document Type
Conference Paper
Authors
Sachs, David
(Maryland Univ. Baltimore County Baltimore, MD, United States)
Singh, N. B.
(Maryland Univ. Baltimore County Baltimore, MD, United States)
Su, Ching-Hua
(NASA Marshall Space Flight Center Huntsville, AL, United States)
Arnold, Bradley
(Maryland Univ. Baltimore County Baltimore, MD, United States)
Cullum, Brian M.
(Maryland Univ. Baltimore County Baltimore, MD, United States)
Choa, Fow-Sen
(Maryland Univ. Baltimore County Baltimore, MD, United States)
Carpenter, Tara
(Maryland Univ. Baltimore County Baltimore, MD, United States)
Mandal, K. D.
(Indian Inst. of Tech. (BHU) Varanasi, Pradesh, India)
Date Acquired
August 6, 2018
Publication Date
April 15, 2018
Subject Category
Solid-State Physics
Life Sciences (General)
Report/Patent Number
M18-6601
Meeting Information
Meeting: SPIE (Defense + Commercial Sensing and Imaging) 2018
Location: Orlando, FL
Country: United States
Start Date: April 15, 2018
End Date: April 19, 2018
Sponsors: International Society for Optical Engineering
Distribution Limits
Public
Copyright
Public Use Permitted.
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