Acquisition Source
Goddard Space Flight Center
Document Type
Conference Paper
Authors
Li, M. J. (NASA Goddard Space Flight Center Greenbelt, MD, United States) Brown, A. D. (NASA Goddard Space Flight Center Greenbelt, MD, United States) Burns, D. E. (NASA Langley Research Center Hampton, VA, United States) Kelly, D. P. (NASA Goddard Space Flight Center Greenbelt, MD, United States) Kim, K. (Maryland Univ. College Park, MD, United States) Kutyrev, A. S. (Maryland Univ. College Park, MD, United States) McCandliss, S.R. (Johns Hopkins Univ. Baltimore, MD, United States) Moseley, S. H. (NASA Goddard Space Flight Center Greenbelt, MD, United States) Mikula, V. (Catholic Univ. of America Washington, DC, United States) Oh, L. H. (SGT, Inc. Greenbelt, MD, United States) Date Acquired
August 27, 2018
Publication Date
June 18, 2017
Meeting Information
Meeting: International Conference on Solid-State Sensors, Actuators and Microsystems
Location: Kaohsiung
Country: Taiwan, Province of China
Start Date: June 18, 2017
End Date: June 22, 2017
Sponsors: Institute of Electrical and Electronics Engineers
Funding Number(s)
CONTRACT_GRANT: NNG06EO90A
CONTRACT_GRANT: NNX15AG60G
CONTRACT_GRANT: NNG13CR48C
Distribution Limits
Public
Copyright
Use by or on behalf of the US Gov. Permitted.
Keywords
Micro-electro-mechanical-system (MEMS)