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Nanostructured Vanadium Oxide Uncooled Bolometers and Method of FabricationThe present invention relates to uncooled microbolometers which can be integrated in future thermal instruments engaged in land imaging on future observatories. The present invention includes: (1) developing and characterizing a microstructured VOx thin film, and, (2) fabricating an uncooled microbolometer array over the 8-14 micron spectral band.
Document ID
20190000790
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Brown, Ari D.
Barrentine, Emily M.
Aslam, Shahid
Date Acquired
February 14, 2019
Publication Date
January 22, 2019
Subject Category
Earth Resources And Remote Sensing
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-10,184,839
Patent Application
US-Patent-Appl-SN-15/691,109
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