Actuation Force Study of Next Generation Micro Shutter Array for More Reliable Actuation

Micro shutter array (MSA) is a programmable optical spatial filtering device fabricated by MEMS technology, which was originally developed for James Webb Space Telescope to enable multi-object spectroscopy. Next Generation Micro Shutter Array (NGMSA) is an effort to improve JWST MSA by eliminating macroscopic actuation magnet and using electrostatic force to achieve simple and reliable instrument that can support NASA’s multiple future missions. We have been fabricating NGMSA with design inherited from JWST, however the legacy design is not friendly for electrostatic actuation because applied force direction on the moving shutter blade is different. We use COMSOL AC/DC module’s electrostatics feature to understand electrostatic force applied on an individual shutter within a range of motion and study new candidate designs. Also, structural mechanics module is used to study torsion bar’s restoration force.