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Reliability in CMOS IC processingCritical CMOS IC processing reliability monitors are defined in this paper. These monitors are divided into three categories: process qualifications, ongoing production workcell monitors, and ongoing reliability monitors. The key measures in each of these categories are identified and prioritized based on their importance.
Document ID
19940004344
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Shreeve, R. (Hewlett-Packard Co. Corvallis, OR, United States)
Ferrier, S. (Hewlett-Packard Co. Corvallis, OR, United States)
Hall, D. (Hewlett-Packard Co. Corvallis, OR, United States)
Wang, J. (Hewlett-Packard Co. Corvallis, OR, United States)
Date Acquired
August 16, 2013
Publication Date
November 6, 1990
Publication Information
Publication: Idaho Univ., The 2nd 1990 NASA SERC Symposium on VLSI Design
Subject Category
Electronics And Electrical Engineering
Accession Number
94N71099
Distribution Limits
Public
Copyright
Public Use Permitted.

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IDRelationTitle19940004343Collected WorksNASA Space Engineering Research Center Symposium on VLSI Design
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