3D thin film microstructures for space microrobotsMicromechanisms of locomotion and a manipulator with an external skeleton like the structure of an insect are proposed. Several micro-sized models were built on silicon wafers by using polysilicon for rigid plates and polyimide for elastic joints. Due to scale effects, friction in micromechanical components is dominant as compared to the inertial forces because friction is proportional to L(exp 2) while mass is proportional to L(exp 3). Therefore, to ensure efficient motion, rotational joint that exhibits rubbing should be avoided. In this paper, paper models of a robot leg and a micro-manipulator are presented to show structures with external skeletons and elastic joints. Then the large scale implementation using plastic plates, springs, and solenoids is demonstrated. Since the assembly technique is based on paper folding, it is compatible with thin film micro-fabrication and integrated circuit (IC) planar processes. Finally, several micromechanisms were fabricated on silicon wafers to demonstrate the feasibility of building a 3D microstructure from a single planar structure that can be used for space microrobots.
Document ID
19960054135
Acquisition Source
Legacy CDMS
Document Type
Abstract
Authors
Shimoyama, Isao (Tokyo Univ. Japan)
Date Acquired
September 6, 2013
Publication Date
January 1, 1995
Subject Category
Mechanical Engineering
Accession Number
96N36381
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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IDRelationTitle19960054083Collected WorksProceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications