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Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space ApplicationsThe recent evolution of microelectronic technologies coupled with the growth of micro-electro-mechanical systems (MEMS) has had significant impact in the commercial sector. The focus of this conference was to anticipate and extend the incorporation of nano-electronics and MEMS into application specific integrated microinstruments (ASIM's) in space systems. Presentations ranged from mission application of nano-satellites to silicon micromachining for photonic applications.
Document ID
19960054083
Acquisition Source
Legacy CDMS
Document Type
Conference Proceedings
Date Acquired
September 6, 2013
Publication Date
January 1, 1995
Subject Category
Astronautics (General)
Report/Patent Number
NASA-CR-201963
NAS 1.26:201963
Accession Number
96N36329
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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