Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Cricchi, J. R. (Westinghouse Electric Corp. Baltimore, MD, United States) White, M. H. (Westinghouse Electric Corp. Baltimore, MD, United States) Date Acquired
August 3, 2013
Publication Date
January 1, 1965
Report/Patent Number
NASA-CR-70390Report Number: NASA-CR-70390 Accession Number
66N21298
Funding Number(s)
CONTRACT_GRANT: NAS5-3758
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
TRANSISTORMETAL OXIDE SEMICONDUCTOR /MOS/PRODUCTION ENGINEERINGEPITAXIAL DEPOSITION