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Process techniques study of integrated circuits Quarterly report no. 3Processing techniques of integrated circuits
Document ID
19660027931
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Meinhard, J. E. (Autonetics Downey, CA, United States)
Date Acquired
August 3, 2013
Publication Date
February 15, 1966
Subject Category
Electronic Equipment
Report/Patent Number
NASA-CR-78253
Report Number: NASA-CR-78253
Accession Number
66N37221
Funding Number(s)
CONTRACT_GRANT: NAS12-4
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
INTEGRATED CIRCUIT
CIRCUIT RELIABILITY
SEMICONDUCTOR DEVICE

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